4 March 1993 Coatings based on alpha-C:H films for laser and soft x-rays technique
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Abstract
Porous structure and outer surface, electronic structure and cluster composition of diamond like films in dependence on film thickness are described. Transparence in the 0.3 - 25 micrometers region, corrosion resistance, and microhardness are also investigated. Diamond like films were obtained by different plasma-ion methods. The thickness of the films covered the range from 3 to 50.0 nm. The thickness of separate layers in multilayer structures was 5.0 - 10.0 nm. It has been shown that multilayer protective coatings based on (alpha) -C:H films allows the user to decrease summary thickness of the coating to raise beam resistance in comparison with one layer coatings in 1.5 - 1.8 times. Service life of a mirror with protective coatings is no less than 3 times more than for mirrors without protective coating. When changing properties and thicknesses of layers in multilayer coatings selective reflection multilayer mirrors and one-layer steering mirrors for the soft x-ray region have been created.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. V. Sleptsov, V. V. Sleptsov, V. M. Elinson, V. M. Elinson, G. F. Ivanovsky, G. F. Ivanovsky, S. S. Gerasimovich, S. S. Gerasimovich, S. I. Sagitov, S. I. Sagitov, } "Coatings based on alpha-C:H films for laser and soft x-rays technique", Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141037; https://doi.org/10.1117/12.141037
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