4 March 1993 Dielectric and metal coatings for excimer laser optics
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Abstract
This article reviews the experimental works dedicated to the development of mirrors and antireflecting coatings for the UVspectrum range carried out in the Quantum Radiophysics Division of P.N Lebedev Physical Institute, Russian Academy of Sciences The methods of obtaining the single-layer anl multilayer optical coatings are given. The effect of the optical coating construction as well as various technological factors of coating process on damage threshold and chemical stability of mirrors is investigated
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Nikolay V. Morozov, Nikolay V. Morozov, Spartak I. Sagitov, Spartak I. Sagitov, P. B. Sergeyev, P. B. Sergeyev, "Dielectric and metal coatings for excimer laser optics", Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141044; https://doi.org/10.1117/12.141044
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