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4 March 1993Guided-wave characterization techniques for the comparison of properties of different optical coatings
The specific behavior of optical thin films very often leads to limitations of optical system performances. It is necessary to have very accurate characterization techniques of the films to get a chance to understand this behavior. Characterization techniques based on the study of the propagation of guided waves in the thickness of the coatings appear to be very efficient. We describe the means we developed in that way to determine the refractive indices and the thickness of our thin films even if they are anisotropic. Guided wave techniques are sensitive enough to detect slight variations of the optical constants of thin films, so we use them to study the variations of refractive index versus temperature. From this study we obtain the thermorefractive coefficients (delta) n/(delta) T of our layers. Still with guided waves techniques, we can obtain, in some cases, the nonlinear index coefficient. We also measure guided waves attenuation and laser damage threshold with a numerical imaging system. These means, dependent upon guided waves, are used together to carry through a comparative analysis of TiO2 and Ta2O5 layers made by different deposition techniques (conventional evaporation-condensation, IAD, Ion Plating).
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Francois Flory, Gerard Albrand, D. Endelema, N. Maythaveekulchai, Emile P. Pelletier, Herve Rigneault, "Guided-wave characterization techniques for the comparison of properties of different optical coatings," Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); https://doi.org/10.1117/12.141013