4 March 1993 Ion-beam sputter deposition techniques for the production of optical coatings of the highest quality
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Continued development of multi-layer dielectric mirrors for applications such as laser gyroscopes shows that the highest quality of optical coatings is still produced by using ion beam sputter deposition. In this technique, a broad-beam ion source is used to sputter coating material off a metallic or dielectric target onto the substrates. Dielectric mirrors with total losses of < 40 ppm are now easy to achieve, and figures below 2 ppm can be managed. These coatings are also used for high power laser mirrors, but are only just starting to be used for other more general applications. In this paper we explain the principles of the technique, and describe the aspects of system design that we have evolved to make these coatings commercially available. We describe the results that we have achieved, particularly with SiO2 and TiO2 coatings. Finally, we attempt to explore the possible applications and design limits of the technology.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Timothy W. Jolly, Timothy W. Jolly, Ramin Lalezari, Ramin Lalezari, } "Ion-beam sputter deposition techniques for the production of optical coatings of the highest quality", Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141036; https://doi.org/10.1117/12.141036


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