Temperature distributions of Ti02 single layer irradiated by iOns,
1. 06 m wavelength laser pulse were calculated with thermal transfer
equation. Following conclusions were obtained: To improve thermal
parameters of coating can reduce the peak temperature obviously; The
thermal parameters of substrate have little effect on temperature
response of coating; Temperature distribution of thin film depends on
the electrical field distribution, The peak temperature of quarter
-wavelength coatings is lower than that of half-wavelength coatings.