1 August 1992 Electric field structure optimization in IC solid state spatial light modulator
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Abstract
The results of the theoretical analysis of electric field structure in a spatial light modulator with viscoelastic deformable layers controlled by addressing a CMOS active matrix are presented.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nickolay B. Kuleshov, Victor A. Tarasov, Igor V. Tokarev, Sergey S. Sarkisov, "Electric field structure optimization in IC solid state spatial light modulator", Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.130996; https://doi.org/10.1117/12.130996
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