1 August 1992 Influence of implanted ion charge on electrophysical parameters of formed structures
Author Affiliations +
Abstract
It has been shown that during the implantation of some ions with the same energy but different charges, amorphous layers of different thickness are observed. To elucidate the reasons of the effect observed, new experiments using ellipsometric and electrophysical measurements have been carried out.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yakh'ya V. Fattakhov, Yakh'ya V. Fattakhov, Evelina Yu. Karas, Evelina Yu. Karas, Il'dus B. Khaibullin, Il'dus B. Khaibullin, Nadegda V. Kurbatova, Nadegda V. Kurbatova, Evgeny I. Shtyrkov, Evgeny I. Shtyrkov, } "Influence of implanted ion charge on electrophysical parameters of formed structures", Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131053; https://doi.org/10.1117/12.131053
PROCEEDINGS
8 PAGES


SHARE
Back to Top