1 August 1992 Microelectronic NH3 sensor on the base of poly-Si films
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Abstract
The hybrid selective gas analyzers for NH3 concentration control with sensitive elements such as poly-Si films and MOS-transistors with threshold voltage, depending on the hydrogenous concentration level, were worked out. Resistance-to-frequency transducers on the base of cascode circuits with intrinsic positive current feedback were fabricated.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fuad J. Kasimov, O. Negodenko, V. Mamikonova, S. Ragimov, "Microelectronic NH3 sensor on the base of poly-Si films", Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131030; https://doi.org/10.1117/12.131030
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