Silicon pressure sensor for biomedicine applications

Jan Dziuban; Anna Gorecka Drzazga; U. Lipowicz

doi:10.1117/12.131033

1 August 1992 Silicon pressure sensor for biomedicine applications

Jan Dziuban, Anna Gorecka Drzazga, U. Lipowicz

Proceedings Volume 1783, International Conference of Microelectronics: Microelectronics '92; (1992) https://doi.org/10.1117/12.131033
Event: International Conference on Microelectronics, 1992, Warsaw, Poland

Abstract

The cather-type silicon pressure sensor for biomedical application is presented. A new cutted piezoresistors configuration of the high sensitivity pressure sensor is proposed.

Citation Download Citation

Jan Dziuban, Anna Gorecka Drzazga, and U. Lipowicz "Silicon pressure sensor for biomedicine applications", Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); https://doi.org/10.1117/12.131033

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available