Thick- and thin-film heaters for gas sensors

Stanislaw Nowak; Tadeusz Pisarkiewicz

doi:10.1117/12.131032

1 August 1992 Thick and thin film heaters for gas sensors

Stanislaw Nowak, Tadeusz Pisarkiewicz

Proceedings Volume 1783, International Conference of Microelectronics: Microelectronics '92; (1992) https://doi.org/10.1117/12.131032
Event: International Conference on Microelectronics, 1992, Warsaw, Poland

Abstract

Thick film RuO₂, AuPt, and thin film Pt heaters of different shapes were manufactured to enable operation of a semiconductor gas sensor at elevated temperatures. Different bonding techniques, i.e., soldering, thermocompression, and ultracompression using Au, Pt, PtRh, Al, and Cu wires, were adopted. Surface temperature distribution was determined with the help of thermovision and point thermocouple measurements. Aging tests reveal good performance of both thick and thin film heaters at temperatures of about 300 degree(s)C. A new method of heater temperature control is described.

Citation Download Citation

Stanislaw Nowak and Tadeusz Pisarkiewicz "Thick and thin film heaters for gas sensors", Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); https://doi.org/10.1117/12.131032

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available