2 March 1993 Electrostatically actuated integrated optical nanomechanical devices
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We demonstrated that active integrated optical (IO) devices based on the IO nanomechanical effect can be actuated by electrostatic forces. In particular, we demonstrated: (1) an intensity modulator, (2) the deflection, and (3) the focusing and defocusing of a guided wave in a planar waveguide.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul Pliska, Paul Pliska, Walter Lukosz, Walter Lukosz, } "Electrostatically actuated integrated optical nanomechanical devices", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); doi: 10.1117/12.141224; https://doi.org/10.1117/12.141224

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