2 March 1993 Fabrication of a silicon Mach-Zehnder interferometer for mechanical measurands
Author Affiliations +
Abstract
We present an integrated Si micromechanical Mach-Zehnder interferometer based on the ARROW structure. The interferometer has its reference arm supported by the Si substrate and the sensing arm is suspended over a cavity realized using Si surface micromachining techniques. An applied pressure causes deflection of the suspended arm resulting in optical path elongation and hence in an optical phase shift with respect to the reference. The design of the interferometer was based on simulations of the photonic transport in the ARROW for the different geometric parameters. Silicon integrated circuit technology was employed for the interferometer fabrication i.e. low temperature CVD oxide for the core and second cladding and LPCVD poly for the first cladding layer. Prior to surface micromachining, the composite waveguide structure was annealed so as to minimize the residual stress and hence the sag in the free standing sensing arm.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arokia Nathan, Arokia Nathan, Yash Bhatnagar, Yash Bhatnagar, Ashok Vadekar, Ashok Vadekar, Wei-Ping Huang, Wei-Ping Huang, } "Fabrication of a silicon Mach-Zehnder interferometer for mechanical measurands", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); doi: 10.1117/12.141226; https://doi.org/10.1117/12.141226
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

2D constant-loss taper for mode conversion
Proceedings of SPIE (March 15 2015)
Optofluidics: a new tool for sensing
Proceedings of SPIE (May 19 2013)
ARROW-based integrated optical pressure sensors
Proceedings of SPIE (September 14 1995)
Optofluidics: waveguides and devices
Proceedings of SPIE (February 01 2012)

Back to Top