2 March 1993 Micromachined silicon accelerometer with fiber optic interrogation
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Silicon micromechanics technology has formed the basis of a range of compact and reliable sensors, measuring variables such as pressure, force and acceleration. Most micromechanical sensors require some form of electrical read-out. Therefore, these sensors are classified as electrically active. Electrically passive sensors also have many applications, and the best examples of such sensors are those based on fiber optic technology. In this paper, we describe a sensor which combines the advantages of both silicon micromechanics and fiber optics. Specifically, an accelerometer has been fabricated, and initial results on the performance of this device are presented.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Deepak G. Uttamchandani, Deepak G. Uttamchandani, Dawei Liang, Dawei Liang, Brian Culshaw, Brian Culshaw, } "Micromachined silicon accelerometer with fiber optic interrogation", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); doi: 10.1117/12.141227; https://doi.org/10.1117/12.141227

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