Translator Disclaimer
2 March 1993 Silicon integrated microsensors
Author Affiliations +
Abstract
This paper reviews the field of silicon-based integrated microsensors. These devices are implemented using fabrication technologies developed for integrated circuits, and lend themselves easily to low cost and high volume production. They are typically much smaller, more precise and stable, have less drift, and are much more reliable than their discrete counterparts. The addition of on-chip integrated circuits to the silicon sensors enables the processing and amplification of low level signals recorded by the sensors, and allows the device to be more easily interfaced and integrated into an electronic measurement and control system. The fabrication of silicon integrated microsensors is reviewed, and a number of examples are discussed. These examples include a multichannel integrated silicon microprobe for the recording of neural signals form the brain cells, and a multi-element infrared thermal detector based on silicon-gold thermopiles.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Khalil Najafi "Silicon integrated microsensors", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); https://doi.org/10.1117/12.141220
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Flip-chip assembly for photonic circuits
Proceedings of SPIE (September 07 2004)
Microfabrication of 32x32 uncooled IR focal plane array
Proceedings of SPIE (October 19 2000)
Silicon-micromachined poppet valve with an octagonal diaphragm
Proceedings of SPIE (September 22 1996)
CMOS resonant sensors
Proceedings of SPIE (September 07 1998)

Back to Top