6 April 1993 Interferometric displacement sensor realized with a planar 3x3 directional coupler in glass
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Proceedings Volume 1794, Integrated Optical Circuits II; (1993) https://doi.org/10.1117/12.141900
Event: Fibers '92, 1992, Boston, MA, United States
Abstract
A miniature integrated optical Michelson interferometer in glass based on a 3 X 3 directional coupler for high precision displacement measuring is presented. The planar waveguide structure can be used simultaneously for beam splitting and generation of phase shifted interference signals. The latter are necessary for decoding the direction of motion and for interpolation procedures to increase resolution and accuracy. The basic process for fabricating the waveguides in the integrated optical chip is a double thermal ion exchange of silver and sodium in special glass BGG31. It allows to produce buried waveguides with low loss and modefield dimensions adjusted to standard silica fibers.
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Roland Fuest, Roland Fuest, Norbert Fabricius, Norbert Fabricius, Uwe Hollenbach, Uwe Hollenbach, Barbara Wolf, Barbara Wolf, } "Interferometric displacement sensor realized with a planar 3x3 directional coupler in glass", Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); doi: 10.1117/12.141900; https://doi.org/10.1117/12.141900
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