Review of the status of LiNbO3 devices and technologies

Hiroshi Mori; Akio Watanabe; Takumi Fujiwara

doi:10.1117/12.141874

6 April 1993 Review of the status of LiNbO₃ devices and technologies

Hiroshi Mori, Akio Watanabe, Takumi Fujiwara

Proceedings Volume 1794, Integrated Optical Circuits II; (1993) https://doi.org/10.1117/12.141874
Event: Fibers '92, 1992, Boston, MA, United States

Abstract

In this paper, we review LiNbO₃-based devices and technologies from both materials and device processing techniques. However, all the relevant areas cannot possibly be covered; we limit the scope of the paper to electrooptic devices. Also, we mostly focus on our own activities at Sumitomo Metal Mining. First, materials-related issues such as the uniformity and consistency of the substrate crystal as assessed by the variability of directional coupler coupling length are summarized. The photorefractive damage resistance is also reviewed; the dependence on the substrate quality and input laser wavelength. Second, taking the case of the multi-function gyro chip, we review and discuss the use of both Ti-indiffused and proton- exchanged waveguides on a single chip.

Citation Download Citation

Hiroshi Mori, Akio Watanabe, and Takumi Fujiwara "Review of the status of LiNbO₃ devices and technologies", Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); https://doi.org/10.1117/12.141874

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