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5 March 1993 Dynamic aiming workpiece edge utilizing differential fiber sensor in on-line measuring system
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Proceedings Volume 1795, Fiber Optic and Laser Sensors X; (1993) https://doi.org/10.1117/12.141262
Event: Fibers '92, 1992, Boston, MA, United States
Abstract
A differential fiber sensor is used as an aiming device in on-line measuring size of the workplace. It can be employed as a tracker in admeasuring micro-displacement of a specimen edge as well. The homodyne detection has been implemented by a closed loop system made up with microcomputer, right-angle prism and PZT. The experimental standard deviation of aiming the edge is confirmed to be within 0.1 micrometers .
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chunhe Wang and Shenghua Ye "Dynamic aiming workpiece edge utilizing differential fiber sensor in on-line measuring system", Proc. SPIE 1795, Fiber Optic and Laser Sensors X, (5 March 1993); https://doi.org/10.1117/12.141262
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