5 March 1993 Dynamic aiming workpiece edge utilizing differential fiber sensor in on-line measuring system
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Proceedings Volume 1795, Fiber Optic and Laser Sensors X; (1993) https://doi.org/10.1117/12.141262
Event: Fibers '92, 1992, Boston, MA, United States
Abstract
A differential fiber sensor is used as an aiming device in on-line measuring size of the workplace. It can be employed as a tracker in admeasuring micro-displacement of a specimen edge as well. The homodyne detection has been implemented by a closed loop system made up with microcomputer, right-angle prism and PZT. The experimental standard deviation of aiming the edge is confirmed to be within 0.1 micrometers .
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chunhe Wang, Chunhe Wang, Shenghua Ye, Shenghua Ye, "Dynamic aiming workpiece edge utilizing differential fiber sensor in on-line measuring system", Proc. SPIE 1795, Fiber Optic and Laser Sensors X, (5 March 1993); doi: 10.1117/12.141262; https://doi.org/10.1117/12.141262
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