5 March 1993 Theoretical and experimental investigation of a new compact fiber optical confocal scanning microscope for industrial surface inspection
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Proceedings Volume 1795, Fiber Optic and Laser Sensors X; (1993) https://doi.org/10.1117/12.141259
Event: Fibers '92, 1992, Boston, MA, United States
Abstract
The presented fiber optical confocal scanning microscope (FOCSM) using multimode fiber offers many advantages with respect to the simplicity and compactness of the sensor configuration and low system cost because only commonly available optical components are used, such as an inexpensive LED source, a GRIN rod lens, a multimode Y-coupler. For diffusely scattering or weakly reflecting industrial objects the sensor provides a high level detector signal owing to higher numerical aperture of the multimode fiber. By considering the optical 3D transfer function the image formation in such a FOCSM has been studied in detail. The small size of the sensing fiber enables us to construct a sensor head with fibers positioned closely side by side. This parallel sensor structure allows us either to accelerate the scanning speed or to perform local real-time filtering operations on objects during scanning which is of importance for many problems in industrial surface inspection.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiang Qiu, Qiang Qiu, } "Theoretical and experimental investigation of a new compact fiber optical confocal scanning microscope for industrial surface inspection", Proc. SPIE 1795, Fiber Optic and Laser Sensors X, (5 March 1993); doi: 10.1117/12.141259; https://doi.org/10.1117/12.141259
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