16 March 1993 Laser coalescence of gold clusters in gold-fluorocarbon composite films
Author Affiliations +
Proceedings Volume 1804, Rapid Thermal and Laser Processing; (1993) https://doi.org/10.1117/12.142088
Event: Microelectronic Processing '92, 1992, San Jose, CA, United States
Abstract
The formation of conducting films from composite films comprised of gold clusters in plasma polymerized polyfluorocarbon (PPFC) is described. A focussed, visible laser beam is used to coalesce the gold clusters within the PPFC matrix. Heating the composite with the laser causes the film to collapse with a loss of weight due to decomposition and volatilization of the polymer. Under the appropriate laser power and scanning conditions, coalescence of the gold particles results in a conducting metal line, exhibiting close to bulk metal resistivity.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul B. Comita, Paul B. Comita, W. Jacob, W. Jacob, E. Kay, E. Kay, Ron Zhang, Ron Zhang, } "Laser coalescence of gold clusters in gold-fluorocarbon composite films", Proc. SPIE 1804, Rapid Thermal and Laser Processing, (16 March 1993); doi: 10.1117/12.142088; https://doi.org/10.1117/12.142088
PROCEEDINGS
7 PAGES


SHARE
Back to Top