Laser repair of flat panel displays

Rodney L. Waters; Floyd R. Pothoven

doi:10.1117/12.142089

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16 March 1993 Laser repair of flat panel displays

Rodney L. Waters, Floyd R. Pothoven

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Proceedings Volume 1804, Rapid Thermal and Laser Processing; (1993) https://doi.org/10.1117/12.142089
Event: Microelectronic Processing '92, 1992, San Jose, CA, United States

Abstract

Lasers have come into wide use for the repair of liquid crystal (LCD), electroluminescent (EL) and plasma flat panel displays. As displays have become larger, more complex and thus increasingly more expensive, repair also has become indispensable. Laser repaid equipment can perform either as on-line production machinery or in a failure analysis role. Most of these repairs have been subtractive, i.e., to remove excess material that causes shorts. Additive repair is a new technique involving metal deposition to correct open faults. This paper traces the development of laser repair to improve yields of flat panel displays.

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Rodney L. Waters and Floyd R. Pothoven "Laser repair of flat panel displays", Proc. SPIE 1804, Rapid Thermal and Laser Processing, (16 March 1993); https://doi.org/10.1117/12.142089

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