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16 March 1993 Laser repair of flat panel displays
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Proceedings Volume 1804, Rapid Thermal and Laser Processing; (1993)
Event: Microelectronic Processing '92, 1992, San Jose, CA, United States
Lasers have come into wide use for the repair of liquid crystal (LCD), electroluminescent (EL) and plasma flat panel displays. As displays have become larger, more complex and thus increasingly more expensive, repair also has become indispensable. Laser repaid equipment can perform either as on-line production machinery or in a failure analysis role. Most of these repairs have been subtractive, i.e., to remove excess material that causes shorts. Additive repair is a new technique involving metal deposition to correct open faults. This paper traces the development of laser repair to improve yields of flat panel displays.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rodney L. Waters and Floyd R. Pothoven "Laser repair of flat panel displays", Proc. SPIE 1804, Rapid Thermal and Laser Processing, (16 March 1993);


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