26 March 1993 Status and trends of laser mask-repair technologies
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Abstract
In the past several months attention has been focused on improving the chrome repair technology, an equally important consideration for future photomask applications. In this paper a new Nd:YAG laser configuration is described. Chrome machining characteristics of the Nd:YAG laser are discussed in terms of the cut-to-cut dimensional stability and the substrate surface quality after repair. Semi-automated stage motion and positioning techniques have been developed to take full advantage of the improved reproducibility of the Nd:YAG laser. It is shown that repair quality has been significantly improved over the full range of repair dimensions compared with the Nd:YAG laser configuration currently employed in laser mask repair tools. In conclusion, the implications of these improvements for future mask applications, including phase-shifting masks, are discussed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James K. Tison, James K. Tison, John M. O'Connor, John M. O'Connor, "Status and trends of laser mask-repair technologies", Proc. SPIE 1809, 12th Annual BACUS Symposium on Photomask Technology and Management, (26 March 1993); doi: 10.1117/12.142138; https://doi.org/10.1117/12.142138
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