Translator Disclaimer
4 May 1993 Compact excimer laser system
Author Affiliations +
Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144676
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece
Abstract
This paper describes the design and operating characteristics of a KrF laser which operates at variable pulse repetition rates up to 100 pps.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dumitru Dragulinescu, Constantin Grigoriu, and L. Tobos "Compact excimer laser system", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); https://doi.org/10.1117/12.144676
PROCEEDINGS
4 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

High average power XeCl excimer laser
Proceedings of SPIE (May 04 1993)
200 W spiker-sustainer XeCl laser
Proceedings of SPIE (August 16 1994)
X-ray phototriggered electric discharge XeCl laser
Proceedings of SPIE (March 31 1995)

Back to Top