Progress of excimer laser development in the AMMTRA project

Haruhiko Nagai

doi:10.1117/12.144662

4 May 1993 Progress of excimer laser development in the AMMTRA project

Haruhiko Nagai

Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144662
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece

Abstract

Since 1986, five kinds of excimer laser technologies have been studied by five companies as part of the large-scale project `Advanced Material-Processing and Machining System,' which is one of the national R&D projects in Japan. The five kinds of excimer lasers being developed are as follows: (1) high power XeCl laser with an average power of 2 kW, (2) high repetition rate XeCl laser with a repetition rate of 5 kHz, (3) automatically power-stabilized 400 W average power XeCl laser with a stability of +/- 1% or less, (4) long-life ArF laser with a gas life of 10⁹ shots or more, and (5) high beam-quality ArF laser with an average power of 200 W. The project passed an interim evaluation at the end of fiscal 1990, and is now ongoing toward the achievement of final targets as of the end of fiscal 1993. The present status and future prospect of the technologies are reviewed.

Citation Download Citation

Haruhiko Nagai "Progress of excimer laser development in the AMMTRA project", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); https://doi.org/10.1117/12.144662

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