4 May 1993 Quality control during excimer laser material processing
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Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144562
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece
Abstract
Excimer lasers prove to be useful tools for precise structuring and uniform surface modification of thin surface layers of ceramics, glasses, and composites. They provide high energy laser pulses and a uniform intensity distribution. Processing quality is strongly affected by laser and process parameters. It is demonstrated that the integration of diagnostics in an excimer laser processing system results in an optimization of processing quality by appropriate choice of the process parameters.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Manfred Geiger, Manfred Geiger, Norbert Lutz, Norbert Lutz, Thomas Rebhan, Thomas Rebhan, Joachim Hutfless, Joachim Hutfless, } "Quality control during excimer laser material processing", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); doi: 10.1117/12.144562; https://doi.org/10.1117/12.144562
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