Surface hardening and improvement of corrosion resistance of SUS304 by KrF excimer laser irradiation in SiH4 gas ambient

Koichi Toyoda; Koji Sugioka

doi:10.1117/12.144584

4 May 1993 Surface hardening and improvement of corrosion resistance of SUS304 by KrF excimer laser irradiation in SiH4 gas ambient

Koichi Toyoda, Koji Sugioka

Author Affiliations +

Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144584
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece

Abstract

Laser implant-deposition (LID) has been referred to as a specific process of surface modification of metals, in which simultaneous deposition and incorporation of Si atoms takes place. Hardness and chemical stability of the surface are improved by the LID process without affecting the intrinsic mechanical properties of the bulk materials. In addition, the surface color can be controlled by changing the film thickness of the deposited films.

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Koichi Toyoda and Koji Sugioka "Surface hardening and improvement of corrosion resistance of SUS304 by KrF excimer laser irradiation in SiH4 gas ambient", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); https://doi.org/10.1117/12.144584

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