28 May 1993 High-resolution fast-response profilometer based on active stabilized interferometry
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Proceedings Volume 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing; (1993) https://doi.org/10.1117/12.145537
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States
Abstract
A noncontact surface profiling technique based on active-stabilized interferometry is described. Direct frequency monitoring by the reference interferometer connected parallel to the sensing interferometer provides high accuracy in nanometer resolution measurement.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fumio Murakami, Fumio Murakami, } "High-resolution fast-response profilometer based on active stabilized interferometry", Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); doi: 10.1117/12.145537; https://doi.org/10.1117/12.145537
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