19 April 1993 Characterization, setup, and control of a manufacturing laser ablation tool and process
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Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143030
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States
Abstract
This paper is a description of the ablation of polyimide with an excimer laser ablation tool in a manufacturing line. The light source is a 150 watt, XeCl (308 nm) gas laser. Two methods of ablating via patterns with the laser tool (full-chip and scan modes) will be discussed, in addition to the tool, set-up, operation and tool/process control.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerhard E. Wolbold, Gerhard E. Wolbold, Christopher L. Tessler, Christopher L. Tessler, Dawn J. Tudryn, Dawn J. Tudryn, } "Characterization, setup, and control of a manufacturing laser ablation tool and process", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143030; https://doi.org/10.1117/12.143030
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