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19 April 1993 Excimer laser processing of aerospace alloys
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Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993)
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States
The affect of varying a wide range of excimer laser parameters on the average etch rate per shot of aerospace alloys (Al, Ti and Ni) has been investigated. The parameters found to most profoundly influence the etch rate were, the laser fluence (up to 70 J/cm2), pulse length (20 - 160 nsec FWHM), gas environment, beam spot size (35 - 300 micrometers ) and material thickness (0.4 - 1.8 mm). Optimization of these parameters has produced an increase in average etch rate per shot from 0.05 to 1.5 micrometers with Ti alloy (2 TA - 10). Such increases in etch rate are seen to occur above a relatively well defined 'critical' fluence for thick samples which it is postulated corresponds to the transition from a largely vaporization dominated to a vaporization/melt expulsion regime. Information is also included on the quality of the processing and on the extent of the laser affected zone around the processed area. Potential aerospace application areas identified and discussed include drilling multiple hole arrays for producing porous surfaces for drag reduction on aircraft and the cutting and profiling of alloy/glass fiber composites (GLARE).
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Graeme Scott and K. Henry "Excimer laser processing of aerospace alloys", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993);


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