19 April 1993 Micromachining with waveguide excimer lasers
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Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143036
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States
Abstract
Small, high-repetition-rate waveguide excimer lasers enable new approaches to pattern and shape generation by ultraviolet photoablation. Using a tabletop microfabrication system that integrates a waveguide excimer laser with vision and motion control systems, we have generated three dimensional structures through direct-write photoablation of polyimide substrates.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Paul Christensen, C. Paul Christensen, Michael T. Duignan, Michael T. Duignan, Louis R. Rodriguez, Louis R. Rodriguez, } "Micromachining with waveguide excimer lasers", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143036; https://doi.org/10.1117/12.143036
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