19 April 1993 Optical materials for use with excimer lasers
Author Affiliations +
Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143032
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States
Abstract
Synthetic UV-grade fused silica, crystalline fluorides, and dielectric coatings have been evaluated for transparency and durability at 193 nm. Most bulk materials eventually develop color centers, and fused silica also changes its density and index of refraction. However, the rate at which these changes occur and their magnitude vary strongly with material, grade, and other more subtle details. Careful selection and possibly pretesting are recommended, in order to ensure optimal matching between the intended application and the material properties.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan H. C. Sedlacek, Mordechai Rothschild, "Optical materials for use with excimer lasers", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143032; https://doi.org/10.1117/12.143032
PROCEEDINGS
9 PAGES


SHARE
Back to Top