Particulate ejection in pulsed-laser deposition

Robert E. Leuchtner; Douglas B. Chrisey; James S. Horwitz

doi:10.1117/12.143049

19 April 1993 Particulate ejection in pulsed-laser deposition

Robert E. Leuchtner, Douglas B. Chrisey, James S. Horwitz

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143049
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

The ejection of sub-micron size particulates from a metal target as a result of the interaction of an excimer laser with a Pt target was investigated. To study the effect of laser fluence, particulates were collected on Pt films prepared on MgO(100) substrates over a fluence range of 0.83 - 3.3 J/cm². Films were prepared at several substrate temperatures: 25 degree(s)C, 350 degree(s)C, 450 degree(s)C, and 550 degree(s)C, and under 0.05 Torr of an inert gas (Ar). It was found that, for a substrate temperature of 450 degree(s)C, the Pt particulates would stick easily to the growing Pt film with little evidence for deformation. The size distributions and areal densities of the metal particulates were measured from low magnification scanning electron micrographs of the thin film surfaces prepared at 450 degree(s)C and compared. In general, spherical particulates were produced with diameters ranging from about 0.05 to 1.0 micrometers . The shape of the size distribution of particulates on the film surface was roughly constant radially outward from the plume center, although the magnitude of the particulates decreased from the plume center. As the fluence increased, the mean diameter of the particulates increased slightly (from 0.25 to 0.35 micrometers ) while the number density of particulates decreased by over two orders of magnitude (from 1.04 X 10⁵ to about 1.0 X 10³ particulates/cm² per angstrom of film deposited) near the plume center.

Citation Download Citation

Robert E. Leuchtner, Douglas B. Chrisey, and James S. Horwitz "Particulate ejection in pulsed-laser deposition", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143049

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