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19 April 1993 Plume dynamics of excimer-laser-vaporized YBa2Cu3O7-delta material
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Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143050
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States
Abstract
Pulsed laser deposition of thin films is a technology that has been explored in some detail. Because of the difficulty of monitoring in real time either the ablation process itself, or thin film growth, many studies have relied on diagnostics of either the ablated plume (emission, absorption, fluorescence) or the resulting films (Tc, Jc, X-ray, RBS) to infer information about the overall process. This indirect approach has provided some vital information for improving the production of high-temperature superconductors. In this study the plume dynamics during the in-situ pulsed laser deposition of YBa2Cu3O7-(delta ) thin films are investigated. The 248 and 308 nm lines of an excimer laser were used to generate a plume from a bulk YBa2Cu3O7-(delta ) target. Variations in the plume distribution as a function of processing gas, pressure, fluence, energy, and spot size were monitored by resulting film distribution and composition and time resolved emission imaging. Results indicate that the plume distribution can be controlled to some extent by the incident laser beam size; in addition, broadening increases with increasing oxygen pressure.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert C. Dye, Stephen R. Foltyn, Robert J. Brainard, A. R. Garcia, Ross E. Muenchausen, Xin Di Wu, and Nicholas S. Nogar "Plume dynamics of excimer-laser-vaporized YBa2Cu3O7-delta material", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143050
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