19 April 1993 Progress in discharge-pumped excimer lasers
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Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143041
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States
Abstract
This paper describes recent results achieved in the development of discharge pumped excimer lasers at the Textron Defense Systems organization (formerly the Avco Research Laboratory). Included is a description of a KrF laser with more than one Joule output at 2.4% efficiency, a 200 mJ XeCl laser operating with a 500 nsec wide pulse, and a several Joule, discharge pumped, KrCl laser operating at 222 nm. All of these devices are switched using thyratrons and are therefore capable of repetitive performance. The KrF and XeCl experiments were conducted with the same laser device operating with a conventional capacitor transfer excitation circuit for the KrF experiments but modified to operate with a pulser-sustainer discharge circuit using magnetic switching for the XeCl tests. The KrCl device is a 40 liter volume system built by Northrop and also operates with a magnetically switched discharge.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles T. Pike, Charles T. Pike, } "Progress in discharge-pumped excimer lasers", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); doi: 10.1117/12.143041; https://doi.org/10.1117/12.143041
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