3 May 1994 Implementation of phase-stepping interferometry to transmitted-light DIC microscopy for dielectric surface evaluation
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Proceedings Volume 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications; (1994); doi: 10.1117/12.171878
Event: Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, 1992, Warsaw, Poland
Abstract
The phase stepping technique with dia illumination is proposed to evaluate surface relief of dielectric layers. An easy implementation is described in a commercially available polarized light interference microscope and experimental results are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Malgorzata Sochacka, Franck Le Provost, "Implementation of phase-stepping interferometry to transmitted-light DIC microscopy for dielectric surface evaluation", Proc. SPIE 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, (3 May 1994); doi: 10.1117/12.171878; https://doi.org/10.1117/12.171878
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