3 May 1994 Phase-stepping DIC technique for reflecting surface evaluation
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Proceedings Volume 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications; (1994) https://doi.org/10.1117/12.171879
Event: Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, 1992, Warsaw, Poland
Abstract
The phase stepping DIC technique is proposed for the surface profiling of highly polished optical substrata. An easy implementation is described in a commercially available polarized light interference microscope for reflected light. Experimental results are presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Malgorzata Sochacka, Malgorzata Sochacka, Leszek Rafal Staronski, Leszek Rafal Staronski, } "Phase-stepping DIC technique for reflecting surface evaluation", Proc. SPIE 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, (3 May 1994); doi: 10.1117/12.171879; https://doi.org/10.1117/12.171879
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