Fluoride multilayer coatings were evaluated for use in 355 nm high reflector applications. The LaF3/Na3AlF6, NdF3/Na3AlF6, and GdF3/Na3AlF6 multilayers had laser damage thresholds of 20 J/cm2, 17.9 J/cm2, and 7.4 J/cm2 (measured at 10 ns pulsewidths), respectively. High tensile stresses in the coatings restricted this evaluation to only 5-layer-pair partial reflectors (49 - 52%). The LaF3/Na3AlF6, NdF3/Na3AlF6, and GdF3/Na3AlF6 multilayers had tensile stresses of approximately equals 1.1 X 109, 1.3 X 109, and 9.3 X 108 dynes/cm2, respectively. Substrate material and glow-discharge processing of the substrates were found to influence the density of stress-induced coating fractures and damage thresholds in some cases. If stress fracturing and scatter can be controlled, these fluoride material combinations are suited for 3(omega) applications.