24 June 1993 Developments in ion-assisted multilayer coatings
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Abstract
The advantages of high current, low voltage ion assisted deposition (IAD) previously demonstrated for single layer films were extended to complex multilayer oxide coatings for medium to large scale applications. Optimization of the IAD parameters led to low absorptance coatings from the IR to the UV. Stress adjustment and matching of layers provided greater cohesive strength and mechanical integrity throughout the stacks. In addition near bulk indices gave enhanced optical performance. Examples of multilayer high reflector stacks for UV, visible, and near IR laser application are given with emphasis on absorption, optical performance in band, elimination of physisorbed water, and at the waterband, environmental stability, and coating durability.
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Thomas R. Culver, Walter T. Pawlewicz, John H. Zachistal, James A. McCandless, Michael W. Chiello, Sherman R. Walters, "Developments in ion-assisted multilayer coatings", Proc. SPIE 1848, 24th Annual Boulder Damage Symposium Proceedings -- Laser-Induced Damage in Optical Materials: 1992, (24 June 1993); doi: 10.1117/12.147426; https://doi.org/10.1117/12.147426
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