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1 July 1993 Optical polyimides for single-mode waveguides
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Proceedings Volume 1849, Optoelectronic Interconnects; (1993) https://doi.org/10.1117/12.147084
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States
Abstract
The synthesis and optical characterization of fluorinated polyimide systems with potential use in passive waveguides and electro-optic devices is reported. The effect of fluorination on optical properties such as refractive index, birefringence, and near-infrared absorbance is reviewed in terms of optical performance requirements. Synthetic methods of tuning the refractive index in order to achieve appropriate core/cladding differentials is discussed. The relation between processing parameters and refractive index for several polyimide structures also is reported. We describe the microlithographic fabrication of a multilayer polyimide rib- type waveguide that is suitable for single mode guiding. The waveguide is fabricated using photosensitive polyimide systems via negative resist imaging. A comparison of wall profiles and resolution limits afforded by the wet-chemical patterning techniques is presented. Results on channel guide coupling, propagation, and loss are described, as well as progress in producing active guides.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Allyson J. Beuhler, David A. Wargowski, Tony C. Kowalczyk, and Kenneth D. Singer "Optical polyimides for single-mode waveguides", Proc. SPIE 1849, Optoelectronic Interconnects, (1 July 1993); https://doi.org/10.1117/12.147084
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