Fast and reliable processing of high-performance InGaAs 0.98-um laser diodes

Frank Vermaerke; Peter Van Daele; Gerrit Vermeire; Ingrid Moerman; Piet M. A. Demeester

doi:10.1117/12.147597

24 June 1993 Fast and reliable processing of high-performance InGaAs 0.98-μm laser diodes

Frank Vermaerke, Peter Van Daele, Gerrit Vermeire, Ingrid Moerman, Piet M. A. Demeester

Proceedings Volume 1851, Processing and Packaging of Semiconductor Lasers and Optoelectronic Devices; (1993) https://doi.org/10.1117/12.147597
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States

Abstract

A simple and highly reliable processing technique for ridge waveguide InGaAs/GaAs SQW lasers is proposed. The comparison is made with other more conventional processing sequences and the measurements indicate that the characteristics of the lasers obtained by this simple method are at least as good and sometimes even better than those made by using the other processing sequences. It also is shown that the simplicity of the process guarantees a high yield. The high performances of these lasers can be further optimized by applying optical coatings.

Citation Download Citation

Frank Vermaerke, Peter Van Daele, Gerrit Vermeire, Ingrid Moerman, and Piet M. A. Demeester "Fast and reliable processing of high-performance InGaAs 0.98-μm laser diodes", Proc. SPIE 1851, Processing and Packaging of Semiconductor Lasers and Optoelectronic Devices, (24 June 1993); https://doi.org/10.1117/12.147597

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