17 June 1993 Noncontact optical characterization of thermal and mechanical properties of thin films
Author Affiliations +
Proceedings Volume 1861, Ultrafast Pulse Generation and Spectroscopy; (1993) https://doi.org/10.1117/12.147064
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States
Abstract
We demonstrate a new purely optical based real-time method for excitation and detection of acoustic and thermal disturbances in thin films. The technique is applied to the determination of viscoelastic properties of unsupported and silicon-supported polyimide thin (approximately 1 micron) films. By comparing data from supported films with that from unsupported films, we demonstrate the sensitivity of this technique to delaminations. We then present calculations that suggest how the same technique may be used to probe film-substrate adhesive quality.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John A. Rogers and Keith A. Nelson "Noncontact optical characterization of thermal and mechanical properties of thin films", Proc. SPIE 1861, Ultrafast Pulse Generation and Spectroscopy, (17 June 1993); doi: 10.1117/12.147064; https://doi.org/10.1117/12.147064
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
Back to Top