Various structures like molds, cavities and textures can be machined in hardest and non- conductive materials using pulsed laser radiation. Possible disadvantages of the process are variation in removal quality and partial reagglomeration of the molten material. In this paper, results of investigations (done with pulsed Nd:YAG-radiation) on the influence of process parameters and on the removal strategy will be shown. The machined result is characterized by the removal rate and the extension of heat affected zones as well as geometric accuracy and surface roughness. Process improvements can be achieved with preselected parameters, remelting of the material surface and an on-line process-control.