15 July 1993 Laser technologies for micro-optics fabrication
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Proceedings Volume 1874, Infrared and Millimeter-Wave Engineering; (1993) https://doi.org/10.1117/12.148050
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States
Here we try to summarize modern views on physical essence and technical opportunities of different laser technologies for MOC fabrication. This paper based previously on our own investigations made at the Laser Technologies Chair of IFMO, St. Petersburg and sometimes on the experience of other authors.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vadim P. Veiko, Vadim P. Veiko, Alexei K. Kromin, Alexei K. Kromin, Evgeny B. Yakovlev, Evgeny B. Yakovlev, "Laser technologies for micro-optics fabrication", Proc. SPIE 1874, Infrared and Millimeter-Wave Engineering, (15 July 1993); doi: 10.1117/12.148050; https://doi.org/10.1117/12.148050


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