6 May 1993 Automatic defect classification for integrated circuits
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Abstract
While initial detection of defects is the most critical function of inspection, automatic classification of detected defects is becoming increasingly desirable. The key to better process control is reliable process measurement. The classification of defects provides valuable process diagnosis information. The hope is that machines can perform this task more reliably than humans. However, there are many problems in automating defect classification, and many of these are related to the central problems in artificial intelligence, such as knowledge representation, inferencing, and dealing with uncertainty. In this paper we pay special attention to the issues arising in the Automatic Defect Classification (ADC) of integrated circuits. We first discuss technical and system requirements, followed by an outline of the technical challenges to be overcome to develop flexible and powerful ACD tools which can be quickly customized on a user level for diverse applications.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul B. Chou, Paul B. Chou, A. Ravishankar Rao, A. Ravishankar Rao, Martin C. Sturzenbecker, Martin C. Sturzenbecker, Virginia H. Brecher, Virginia H. Brecher, "Automatic defect classification for integrated circuits", Proc. SPIE 1907, Machine Vision Applications in Industrial Inspection, (6 May 1993); doi: 10.1117/12.144802; https://doi.org/10.1117/12.144802
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