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23 July 1993 Fabrication of "smart" ferroelastic-ferroelectric heterostructures
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Abstract
Smart materials composed of ferroelastic and ferroelectric materials are described for damping of mechanical waves. These heterostructures using active and adaptive materials will likely be represented by heterostructures of several types of thin and thick films. In this investigation, deposition and processing of thin film ferroelastic TiNi and thin film ferroelectric BaTiO3 and Pb(Zr,Ti)O3 are discussed. Growth conditions as well as the thermodynamic conditions for successful synthesis are described. it was found that amorphous thin films of TiNi and BaTiO3 can be crystallized simultaneously by air annealing at 600 degree(s)C. Onto bulk TiNi samples, PZT was synthesized successfully, with good mechanical bonding.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Peter Jardine and John S. Madsen "Fabrication of "smart" ferroelastic-ferroelectric heterostructures", Proc. SPIE 1916, Smart Structures and Materials 1993: Smart Materials, (23 July 1993); https://doi.org/10.1117/12.148495
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