Theory And Application Of Laser Interferometer Systems

Lucia S. Liu; John H. Klinger

doi:10.1117/12.957832

25 December 1979 Theory And Application Of Laser Interferometer Systems

Lucia S. Liu, John H. Klinger

Proceedings Volume 0192, Interferometry; (1979) https://doi.org/10.1117/12.957832
Event: 23rd Annual Technical Symposium, 1979, San Diego, United States

Abstract

The theory and operation of the laser interferometer is explained in this paper. The laser system is widely used in the metal working industry, IC manufacturing, RED and a growing new area of disc drive track writing. The type of measurements made include length, angle, flatness, straightness and squareness. The advantage of the laser over conventional equipment includes high speed, versatility and the inherent accuracy of the system.

Citation Download Citation

Lucia S. Liu and John H. Klinger "Theory And Application Of Laser Interferometer Systems", Proc. SPIE 0192, Interferometry, (25 December 1979); https://doi.org/10.1117/12.957832

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