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25 August 1993 Dynamics of deformable mirror actuators
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Abstract
The electro-mechanical equations governing the motion of the surface of a deformable mirror, due to the activation of a piezoelectric or electrostrictive actuator mechanically located between the mirror surface and the mirror substrate, are derived in terms of the fundamental electro-mechanical parameters of the mirror-actuator configuration. The equations of motion are solved in the frequency domain and the solutions show reasonable agreement with experimental data such as Bode plots, which characterize the frequency dependence of the amplitude and phase of the mirror surface motion, and with frequency dependent impedance measurements. Time domain solutions are used to construct time histories of an actuator under a step-voltage input.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wayland Clinton Marlow "Dynamics of deformable mirror actuators", Proc. SPIE 1920, Active and Adaptive Optical Components and Systems II, (25 August 1993); https://doi.org/10.1117/12.152689
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