25 August 1993 Low-voltage SELECT deformable mirrors
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The low voltage SELECT deformable mirror described herein provides sub-nanometer control of the optical wavefront and represents the culmination of 10 years of development. Due to the maturity of the PMN electrostrictive actuator technology, the mirror operating voltage has decreased from 3000 volts to 100 volts, the hysteresis has been reduced from near 20% to less than 1%, and the response uniformity is better than 3% over the entire actuator population. But more importantly, the deformable mirrors built today are unparalleled in terms of performance and reliability, even after millions of operational cycles. This paper will summarizes the actuator process developments and discuss the design features and measured performance of the low voltage SELECT deformable mirror family. In fact as the results will show, the SELECT DM's are not only good deformable mirrors, but are also among the most precise optics ever made, especially when operated under active control.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark A. Ealey, Mark A. Ealey, } "Low-voltage SELECT deformable mirrors", Proc. SPIE 1920, Active and Adaptive Optical Components and Systems II, (25 August 1993); doi: 10.1117/12.152655; https://doi.org/10.1117/12.152655


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