Comparative study of MEBES III and CORE 2564 performance in a manufacturing environment

Theron L. Felmlee; Vijaya N.V. Raghavan

doi:10.1117/12.146529

24 June 1993 Comparative study of MEBES III and CORE 2564 performance in a manufacturing environment

Theron L. Felmlee, Vijaya N.V. Raghavan

Proceedings Volume 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III; (1993) https://doi.org/10.1117/12.146529
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

Many of the same considerations that were instrumental in providing the state-of-the-art e- beam process were implemented in the recent installation of the ETEC CORE 2564 laser-beam mask/reticle lithography system and the associated process setup. The possession of two high- performance mask/reticle production processes created a need to perform a comparative investigation of the manufacturing performance of the two systems and their associated processes. This study points out some of the manufacturing strengths and weaknesses of these two distinctly different mask/reticle production processes. This is done on the basis of each system's performance to published specifications, (relative to each other) and on the manufacturing process capability characteristics of the finished mask/reticle.

Citation Download Citation

Theron L. Felmlee and Vijaya N.V. Raghavan "Comparative study of MEBES III and CORE 2564 performance in a manufacturing environment", Proc. SPIE 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III, (24 June 1993); https://doi.org/10.1117/12.146529

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available