24 June 1993 Helios compact synchrotron x-ray source: one year of operation at ALF
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Abstract
The first Helios compact synchrotron x-ray source began routine operation at the IBM Advanced Lithography Facility (ALF) in East Fishkill, NY, in January of 1992. This paper presents data on the ring's performance during its initial fourteen months of operation.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David E. Andrews, David E. Andrews, Charles N. Archie, Charles N. Archie, } "Helios compact synchrotron x-ray source: one year of operation at ALF", Proc. SPIE 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III, (24 June 1993); doi: 10.1117/12.146517; https://doi.org/10.1117/12.146517
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