Image formation in capillary arrays: the Kumakhov lens

Guan-Jye Chen; Richard K. Cole III; Franco Cerrina

doi:10.1117/12.146518

24 June 1993 Image formation in capillary arrays: the Kumakhov lens

Guan-Jye Chen, Richard K. Cole III, Franco Cerrina

Proceedings Volume 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III; (1993) https://doi.org/10.1117/12.146518
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

The successful ray-tracing simulation of the Kumakhov lens has been demonstrated. The issues of the transmission coefficient and the output intensity uniformity of Kumakhov lens are addressed. Various factors such as source distance, tube shape, thickness, and diameter which affect the output performance of this new optics are also discussed.

Citation Download Citation

Guan-Jye Chen, Richard K. Cole III, and Franco Cerrina "Image formation in capillary arrays: the Kumakhov lens", Proc. SPIE 1924, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III, (24 June 1993); https://doi.org/10.1117/12.146518

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